Tantalum etchant 111 semiconductor grade
Supplier: TRANSENE PC
|
Danger
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TANT111-QT
TANT111-GAL
76540-950EA
47
USD
76540-950
76540-957
Tantalum etchant 111 semiconductor grade
Tantalum etchant
Tantalum Etchant 111 provides controlled etching of tantalum, tantalum oxide, and tantalum nitride materials.
Density:
> 1 g/cc Storage Temperature: Ambient |
UN:
2922 ADR: 8, 6.1,II |
Specification Test Results
Appearance | Clear, colorless |
Etch Capacity (rate declines at ~70%) | 65 g/gallon |
Etch Rate at 25°C | 30-40 Å/sec |
Filtration | 0,2 um |
Incompatible Materials | Oxide, Nitride, Al, GaAs |
pH | Strongly acidic |
Recommended Operating Temperatures | 20-80°C (30-40°C most common) °C |
Shelf Life | 1 Year |
Storage Conditions | Ambient |
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