Tantalum etchant 111 semiconductor grade

Supplier: TRANSENE PC
Danger

TANT111-QT TANT111-GAL
76540-950EA 47 USD
76540-950 76540-957
Tantalum etchant 111 semiconductor grade
Tantalum etchant

Tantalum Etchant 111 provides controlled etching of tantalum, tantalum oxide, and tantalum nitride materials.

Density: > 1 g/cc
Storage Temperature: Ambient
UN: 2922
ADR: 8, 6.1,II

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Specification Test Results

Appearance Clear, colorless
Etch Capacity (rate declines at ~70%) 65 g/gallon
Etch Rate at 25°C 30-40 Å/sec
Filtration 0,2 um
Incompatible Materials Oxide, Nitride, Al, GaAs
pH Strongly acidic
Recommended Operating Temperatures 20-80°C (30-40°C most common) °C
Shelf Life 1 Year
Storage Conditions Ambient

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