HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥100%, Low-Metal (LM) grade

Supplier: TRANSENE PC

Synonyms: Hexamethyldisilazane

100-HMDS100-GAL 100-HMDS100-QT
76540-986CS 1403.86 USD
76540-986 76541-038
HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥100%, Low-Metal (LM) grade
HMDS (1,1,1,3,3,3-hexamethyldisilazane)
Formula: (CH₃)₃SiNHSi(CH₃)₃
MW: 161.39 g/mol
MDL Number: MFCD00008259
CAS Number: 999-97-3

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Specification Test Results

Assay (HMDS) 99.92 min %
Water (H2O) 50 ppm max.
Color 10 APHA max.
Chloride (Cl) 2 ppm max.
Trailing Impurity 0.024 % max.
UV abs at 270 nm 0.039-0.115
Aluminum (Al) 0.8 ppb max.
Arsenic and Antimony (as As) 0.4 ppb max.
Barium (Ba) 0.03 ppb max.
Beryllium (Be) 0.16 ppb max.
Bismuth (Bi) 0.02 ppb max.
Boron (B) 3 ppb max.
Cadmium (Cd) 0.2 ppb max.
Calcium (Ca) 2.2 ppb max.
Chromium (Cr) 1 ppb max.
Cobalt (Co) 0.1 ppb max.
Copper (Cu) 0.5 ppb max.
Gallium (Ga) 0.1 ppb max.
Germanium (Ge) 0.12 ppb max.
Gold (Au) 0.08 ppb max.
Iron (Fe) 0.2 ppb max.
Lead (Pb) 0.2 ppb max.
Lithium (Li) 0.1 ppb max.
Magnesium (Mg) 0.3 ppb max.
Manganese (Mn) 0.2 ppb max.
Molybdenum (Mo) 0.3 ppb max.
Nickel (Ni) 0.4 ppb max.
Potassium (K) 0.4 ppb max.
Silver (Ag) 0.1 ppb max.
Sodium (Na) 0.88 ppb max.
Strontium (Sr) 0.1 ppb max.
Tantalum (Ta) 0.12 ppb max.
Thallium (Tl) 2 ppb max.
Tin (Sn) 0.2 ppb max.
Titanium (Ti) 2 ppb max.
Vanadium (V) 0.4 ppb max.
Zinc (Zn) 0.7 ppb max.
Zirconium (Zr) 0.2 ppb max.
Particle Count, 1.0 mm 10 ct/ml max.
Particle Count, 0.5 mm 20 ct/ml max.
Particle Count, 0.3 mm 50 ct/ml max.
Particle Count, 0.2 mm 90 ct/ml max.

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